SAN JOSE, Calif. &#151 KLA-Tencor Corp. introduced its latest overlay metrology tool for the 65-nm node and beyond. Based on its Archer tool platform, the new Archer AIM+ reduces total measurement ...
“In order to continue scaling devices to meet Moore's law, chip manufacturers are extending 193nm immersion lithography using multi-patterning techniques and are assessing non-traditional patterning ...